Ceramics End Effector / Handling Arm ｜Fine Ceramics｜ASUZAC Inc. Fine Ceramics Division

End Effector / Handling Arm

Ceramic End Effector / Handling Arm is installed on wafer handling robot or "end effectors" and used to carry silicon wafers into or out of cassettes or process chambers.
The benefits of using ceramics are reduction of deflection due to high flexural strength, resistance to high temperatures, and elimination of metal contamination and particles.

Applications

Vacuum End Effector / Handling Arm with inner channel
Tray End Effector / Handling Arm
End Effector / Handling Arm with embedded porous pads

Materials

Alumina

The most commonly used ceramic material, alumina is relatively inexpensive yet demonstrates favorable properties such as electrical insulation, wear resistance, and chemical stability.
Silicon Carbide

This material is second in hardness to only diamond and boron carbide.
Also, it has high heat resistance, wear resistance, Young's modulus, low thermal expansion, and excellent chemical stability.
Corseed

Developed in-house, this material has a good thermal conductivity near that of metal and offers a density high enough to prevent particle retention.

Outgas freeAdhesive free

ASUZAC's original vacuum End Effector / Handling Arm with inner channel

ASUZAC offers a vacuum ceramic End Effector / Handling Arm with a built-in hollow channel. We specialize in a technique that forms a vacuum air channel inside a single piece of material without needing to combine several plates together using adhesive.

Because the hollow channel can be created without adhesive, there is no risk of delamination, outgassing, or increased particles. ASUZAC's vacuum End Effector / Handling Arm with built-in channel are durable and can be used at high temperatures. Moreover, our manufacturing cost can be reduced by eliminating unnecessary assembly.

	Min (mm)	Max (mm)
AFull thickness	1.5	4
BHollow channel thickness	0.5	0.7
CWall thickness between hollow channel and surface	0.5	-
DHollow channel width	2	6
EAllowable distance from side	2	-
FSuction hole diameter	10	230
GHollow channel length	-	360

※These dimensions may change according to the size and shape.
Please contact us for details.

Standardized parts are also available.

For customers requiring short lead times and immediate shipment, we offer standardized products to eliminate the need for design and discussion.

Please feel free to consult us about our standardized product lineup!

Contact Us

Customizable from single quantity orders.
Please feel free to contact us.