Ceramics products/ Chamber Components
Products
Chamber Components
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Chamber Components:
Our ceramic components are being adopted as vacuum parts for semiconductor manufacturing equipment. Alumina and Silicon Carbide (SiC) are increasingly used for clamping wafers or plasma-resistant parts. Semiconductor designs are undergoing constant miniaturization and multi-layering.
We have confidence in offering ceramic applications that can respond to such a rapidly changing market trend in the industry.
Applications
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Wafer Trays
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Ceramic Shields
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Ceramic Rings
Contact Us
Customizable from single quantity orders.
Please feel free to contact us.
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ASUZAC Inc.
Fine Ceramics DivisionOpening hours：9:00～17:00（Sat, Sun closed）
FAX : +81-26-251-2160
Product Search
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- Chamber Components
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- Wafer Hands
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- Porous Chucks
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- Large Parts for Display Manufacturing Equipment
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- Setters
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- Substrates
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- Crucibles
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- Trays