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Porous Ceramics｜Ceramics materials

Materials

Porous Ceramics

Porous Ceramics

Porous alumina ceramics are ceramics with countless pores or "holes" inside. As porous material has low thermal conductivity and is lightweight, it is used for filters, bubblers, vacuum chucks, air blowing, and more. Thera are two kinds of porous ceramics we have - Alumina and SiC. We will select the best material that suites your application. 

Click here for the Property Chart [PDF].

  • Porous Alumina Ceramics

    This is a type of porous ceramics consisted of Al2O3. Porous Alumina Ceramics are well-balanced in the thermal and mechanical properties. Its weight is almost the half of the solid Alumina. It can be safely used in the temperature range of 600 to 1600 degree Celcius.  We have 5 grades, depending on its air permeability and color.

    【AZP50】・【AZPV60】・【AZPV60B】・【AZPW40】・【AZPWB40】・【AZPV60】

    【AZPV60】New!

    ASUZAC succeeded in increasing air permeability while minimizing pore diameter.

    Feature:

    *Air permeability rate is almost doubled compared to the conventional AZPW40.

    *Pore diameter is almost the half of the conventional AZPW40, which makes suction force even and prevents wafer deformation.
    Application:

    * Suitable for suction pads embedded in wafer chuck tables.

    * Suitable for gripping a thin, warped wafer.


  • Porous SiC Ceramics

    This is a type of porous ceramics consisted of SiO2. Porous SiC Ceramics are available in the application exposed to rapid thermal change via heating & cooling, acid chemicals and pressure from heavy load, etc., all of which Alumina version cannot cope with.

    Its weight is almost the half of the solid Alumina and it can be safely used in the temperature range of 1400 to 1600 degree Celcius. It is hard to be bent and easy to disperse heat. We have 2 grades, depending on its air permeability.

    【AZPS40】・【AZPVS60】

    【AZPVS60】 New!

    This is an SiC version of AZPV60, Porous Alumina Ceramics.

    Feature:

    *Air permeability rate is nearly 26 times higher compared to the conventional AZPS40.

    *Pore diameter is smaller than that of the conventional AZPW40, which makes suction force even and prevents wafer deformation.

    *It has good thermal conductivity and is easy to get heated up and cooled down, saving time and cost in the heat-treating process.
    Application:

    * Suitable for setters or sintering plates that require the ability to remove bider from works and to withstand rapid thermal change.

    * Suitable for lightweight heat sink that dispese heat.

  • Characteristics

    • Porous ceramics allow liquids and gas to pass through.

    • Porous ceramics are lighter than metal and the lightest among ceramics.

    • Porous ceramics can be shaped precisely enough to be fit into a housing with no gap.

    • Porous ceramics can levitate fine electronic components by air blow.

    • Porous ceramics can grip wafers partially regardless of the wafer size.

    • Porous ceramics do not hurt the work because the surface is clean and smooth, which is possible in AZPS40 only.

  • Applications

    • Vacuum chuck table / Suction pads for wafer hands

    • Weight reduction of components.
      (Porous ceramics are lighter than aluminium.)

    • Heat insulation plate (Alumina) / Heat sink (SiC)

    • Plate and setter for kiln/furnace

    • Gas filter

    • A component that prevents film detachment in CVD/PVD equipment.

    • To levitate wafers by air blowing to avoid contamination

    • Deodorant, Dust collection, Filtration, Water purification

    • Low dielectric components

Characteristics by Porosity Rate

  • 多孔質セラミックス アルミナ

    AZP50　（Porosity Rate: 50％）

    Alumina

    For weight reduction and heat insulation.

    * The material is 99.6% Al2O3. Mostly composed of closed pores.

    * The strength is about 1/3 compared to normal solid alumina.

  • 多孔質セラミックス アルミナ

    AZP60　（Porosity Rate: 60％）

    Alumina

    For weight reduction, heat insulation, suction, filtration, bubbling, and levitation.

    * Smooth surface prevents scratches from wafers.

    * Less responsive than AZPW40 but suitable for partial suction.

  • 多孔質セラミックス アルミナ

    AZP60B　（Porosity Rate: 73％）

    Alumina

    For weight reduction, heat insulation, filtration, and optical jigs.

    * Black version of AZP60, making dirt and dust less visible.

    * Suitable for image processing, optical units and other applications that requires low light-reflection.

  • 多孔質セラミックス アルミナ

    AZPW40　（Porosity Rate: 40％）

    Alumina

    For suction and filtration.

    * High responsiveness enabled by continuous and large pores.

    * Suitable for sucking a warped work.

  • 多孔質セラミックス アルミナ

    AZPWB40　（Porosity Rate: 35％）

    Alumina

    For weight reduction, suction, filtration and optical inspection Jig
    Because of its gray color, it can prevent light reflection and can be used where dirts need to be less noticeable.

  • 多孔質セラミックス アルミナ

    AZPV60　（Porosity Rate: 60％）New!

    Alumina

    For weight reduction, suction and filtration.

    * High suction force due to good air penetration rate.

    * Finely controlled pores generate suction force evenly and entirely without deforming a work.

  • 多孔質セラミックス アルミナ

    AZPS40　（Porosity Rate: 40％）

    SiC

    For suction and heat sink.

    * Smooth due to its continuous fine pores. Possible to polish the surface up to 6 mincron for flatness.

  • 多孔質セラミックス アルミナ

    AZPVS60　（Porosity Rate: 60％）New!

    SiC

    For weight reduction, filtration, setters, and heat sink.

    * SiC version of AZPV60, offering high suction force enabled by good air penetration.

    * Suitable for setters due to its excellent thermal conductivity that can cope with rapid cycle of heating-up and cooling-down.

Fine Processing of Porous SiC

Fine continuous pores enable fine processing, such as small diameter hole processing, fine groove processing, projection processing, tap processing, and so on.

We can customize your products according to your application, such as suction jigs that match the workpiece, filters and molds, assembled products with other parts, and more.

Fine processing of porous SiC
Hole processing: Dia. 0.7 x 3.0T / Pitch 1mm		 Fine processing of porous SiC
Small parts: Dia. 2.5 x 2.5L / Counterbore hole: Dia 1.6 x 2.0D
Fine processing of porous SiC
Rib: 0.5W x 2.0H 		Fine processing of porous SiC
Pin: 0.8SQ x 0.5D
All the above examples are porous SiC "AZPS-40". Depending on the porosity rate, we may not be able to meet your requirement, and ask you to re-design the product. Anyway, contact us first and then discuss for details.

Porous Ceramics - Manufacturable Dimensions (mm)

Minimum thickness Maximum thickness Dimension Length
Thickness Dimension Thickness Dimension Thickness Dimension Thickness Width Length
AZP50 1 ◻︎20 50 ◻︎50 15 ◻︎500 15 500 500
AZP60 1 ◻︎20 50 ◻︎50 15 ◻︎500 15 500 500
AZP60B 1 ◻︎20 50 ◻︎50 15 ◻︎500 15 500 500
AZPW40 1 ◻︎30 50 ◻︎200 20 ◻︎300 10 50 600

AZPWB40

 1 ◻︎30 50 ◻︎200 20 ◻︎300 10 50 600
AZPV60                  
AZPS40 1 ◻︎20 50 ◻︎100 20 ◻︎310 20 50 600
AZPVS60                  

*Contact us if you need even larger products than those in the above list.

*The dimensions above are only for reference. Depending on the shape, we may not be able to process material exactly as per those dimensions.

* The figures for AZPV60 and AZPVS60 will be entered after the demonstration test.

Property Chart - Porous Alumina and Porous SiC

Item Unit Alumina SiC
AZP50 AZP60 AZP60B AZPW40 AZPWB40 AZPV60 AZPS40 AZPVS60
Porosity % 50 60 73 40 35 60 40 60
Pore diameter μm 5〜40 5〜40 5〜40 50〜100 50～200 20～40 5～30 10～30
Bulk density g/cm3 1.82 1.57 1.04 2.56 2.48 1.54 1.9 1.32
Air Penetration rate (×10-13m2) 0.8 5.73 - 100 270 200 6.1 160
Purity % 96 96 - 95 90   98  
Flexual strength MPa 60 35 30 76 22 28 80 4
Dielectric constant 1MHz - - - 4.1 - 3.8 - 35.8
Thermal conductivity W/(m・K) - - - 3 5 13.4 70 70.4
Thermal expansion coefficient ×10-6 - - - 7.6 7.6 8 4.4 4.4
(RT-800℃) (RT-700℃)
Color - White White Black White Black White Glay Black
Application Light-reducible ○ ○ ○ × ○ ○ × ○
Heat insulation ○ ○ ○ × ○ × × ×
Vacuum Chuck × ○ ○ ○ ○ ○ ○ ○

Filter, Rectification (Air/Fluid), Spraying

 × ○ ○ ○ ○ ○ ○ ○
Suited application Light, Heat insulation Fine surface, Able to grip films and thin wafers. Suitable for image processing and anti-reflection.

Large pores with relatively good penetration rate.

Suitable for image processing and anti-reflection.

Smaller pores and higher penetgration rate than AZP60.

Owning AZP60 properties plus more strength. Partial gripping possible.

Suitable for setter plates that can prevent reaction between setters and works.

Click here for Property Chart [PDF]

Comparision between Normal Ceramics and Porous Ceramics

  • Dielectric Constant【1MHz】

    Porous Ceramics　Dielectric Constant【1MHz】

    Indicates how much electricity can be stored.
    Low dielectric loss material enhances uniformity of plasma.

  • Thermal Conductivity

    Porous Ceramics　Thermal Conductivity

    Indicates how easily heat can be transmitted.
    Porous ceramics are low in thermal conductivity and adaptable with changes in temperature .

  • Porosity Rate【％】

    Porous Ceramics　Porosity Rate【％】

    Indicates how many pores are present inside the ceramics. However, please do not take porosity rate as 'air permeability rate' because pores may present unevenly inside the ceramics.

    For details about air permeability rate, please contact us.

  • Flexural Strength【MPa】

    Porous Ceramics　Flexual Strength【MPa】

    Indicates strength against sudden load.
    The strength is lower than normal dense ceramics, but worth choosing this as porous ceramics can provide other unparalleled benefits.

  • Bulk Density【g/cm3】

    Porous Ceramics　Bulk Density【g/cm3】

    Indicates the weight per volume.
    Porous ceramics are lighter than normal alumina and SiC.

  • Air Permeability Rate【×10-13m2】

    Porous Ceramics　Air Permeability Rate【×10-13m2】

    Indicates air permeability of porous ceramics (JIS R 2115).

  • Young's Modulus Elasticity【GPa】

    Porous Ceramics　Young's modulus elasticity【GPa】

    Indicates the degree of the ceramics not being distorted by pressure.
    The higher the value is, the more rigid it is, meaning that the material does not easily bend or distort even by pressure under load.

Porous Ceramics - Short Movies

  • Porous SiC Vacuum Chuck
    Air Gripping Test

  • Porous Ceramics
    Non-contact Levitation Stage

  • Gripping Power Test by Large Porous Chuck

  • Porous Ceramics Bubbler in High Temperature, Strong Acid, and Strong Alkaline Atmosphere

  • Porous Ceramics Bubbler

  • Porous Ceramics
    Tweezers for Gripping Multi-directional Film

Contact Us

Customizable from single quantity orders.
Please feel free to contact us.

  • ASUZAC Inc.
    Fine Ceramics Division

    +81-26-248-1626

    Opening hours：9:00～17:00（Sat, Sun closed）

    FAX : +81-26-251-2160

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