Porous Ceramics|Ceramics materials
Materials
Porous Ceramics
Porous alumina ceramics are ceramics with countless pores or "holes" inside. As porous material has low thermal conductivity and is lightweight, it is used for filters, bubblers, vacuum chucks, air blowing, and more. Thera are two kinds of porous ceramics we have - Alumina and SiC. We will select the best material that suites your application.
Click here for the Property Chart [PDF].
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Porous Alumina Ceramics
This is a type of porous ceramics consisted of Al2O3. Porous Alumina Ceramics are well-balanced in the thermal and mechanical properties. Its weight is almost the half of the solid Alumina. It can be safely used in the temperature range of 600 to 1600 degree Celcius. We have 5 grades, depending on its air permeability and color.
【AZP50】・【AZPV60】・【AZPV60B】・【AZPW40】・【AZPWB40】・【AZPV60】
【AZPV60】New!
ASUZAC succeeded in increasing air permeability while minimizing pore diameter.
Feature:
*Air permeability rate is almost doubled compared to the conventional AZPW40.
*Pore diameter is almost the half of the conventional AZPW40, which makes suction force even and prevents wafer deformation.
Application:* Suitable for suction pads embedded in wafer chuck tables.
* Suitable for gripping a thin, warped wafer.
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Porous SiC Ceramics
This is a type of porous ceramics consisted of SiO2. Porous SiC Ceramics are available in the application exposed to rapid thermal change via heating & cooling, acid chemicals and pressure from heavy load, etc., all of which Alumina version cannot cope with.
Its weight is almost the half of the solid Alumina and it can be safely used in the temperature range of 1400 to 1600 degree Celcius. It is hard to be bent and easy to disperse heat. We have 2 grades, depending on its air permeability.【AZPS40】・【AZPVS60】
【AZPVS60】 New!
This is an SiC version of AZPV60, Porous Alumina Ceramics.
Feature:
*Air permeability rate is nearly 26 times higher compared to the conventional AZPS40.
*Pore diameter is smaller than that of the conventional AZPW40, which makes suction force even and prevents wafer deformation.
*It has good thermal conductivity and is easy to get heated up and cooled down, saving time and cost in the heat-treating process.
Application:* Suitable for setters or sintering plates that require the ability to remove bider from works and to withstand rapid thermal change.
* Suitable for lightweight heat sink that dispese heat.
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Characteristics
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Porous ceramics allow liquids and gas to pass through.
Porous ceramics are lighter than metal and the lightest among ceramics.
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Porous ceramics can be shaped precisely enough to be fit into a housing with no gap.
Porous ceramics can levitate fine electronic components by air blow.
Porous ceramics can grip wafers partially regardless of the wafer size.
Porous ceramics do not hurt the work because the surface is clean and smooth, which is possible in AZPS40 only.
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Applications
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Vacuum chuck table / Suction pads for wafer hands
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Weight reduction of components.
(Porous ceramics are lighter than aluminium.) -
Heat insulation plate (Alumina) / Heat sink (SiC)
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Plate and setter for kiln/furnace
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Gas filter
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A component that prevents film detachment in CVD/PVD equipment.
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To levitate wafers by air blowing to avoid contamination
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Deodorant, Dust collection, Filtration, Water purification
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Low dielectric components
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Characteristics by Porosity Rate
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AZP50 (Porosity Rate: 50%)
Alumina
For weight reduction and heat insulation.
* The material is 99.6% Al2O3. Mostly composed of closed pores.
* The strength is about 1/3 compared to normal solid alumina.
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AZP60 (Porosity Rate: 60%)
Alumina
For weight reduction, heat insulation, suction, filtration, bubbling, and levitation.
* Smooth surface prevents scratches from wafers.
* Less responsive than AZPW40 but suitable for partial suction.
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AZP60B (Porosity Rate: 73%)
Alumina
For weight reduction, heat insulation, filtration, and optical jigs.
* Black version of AZP60, making dirt and dust less visible.
* Suitable for image processing, optical units and other applications that requires low light-reflection.
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AZPW40 (Porosity Rate: 40%)
Alumina
For suction and filtration.
* High responsiveness enabled by continuous and large pores.
* Suitable for sucking a warped work.
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AZPWB40 (Porosity Rate: 35%)
Alumina
For weight reduction, suction, filtration and optical inspection Jig
Because of its gray color, it can prevent light reflection and can be used where dirts need to be less noticeable. -
AZPV60 (Porosity Rate: 60%)New!
Alumina
For weight reduction, suction and filtration.
* High suction force due to good air penetration rate.
* Finely controlled pores generate suction force evenly and entirely without deforming a work.
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AZPS40 (Porosity Rate: 40%)
SiC
For suction and heat sink.
* Smooth due to its continuous fine pores. Possible to polish the surface up to 6 mincron for flatness.
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AZPVS60 (Porosity Rate: 60%)New!
SiC
For weight reduction, filtration, setters, and heat sink.
* SiC version of AZPV60, offering high suction force enabled by good air penetration.
* Suitable for setters due to its excellent thermal conductivity that can cope with rapid cycle of heating-up and cooling-down.
Fine Processing of Porous SiC
Fine continuous pores enable fine processing, such as small diameter hole processing, fine groove processing, projection processing, tap processing, and so on.We can customize your products according to your application, such as suction jigs that match the workpiece, filters and molds, assembled products with other parts, and more.
![]() Hole processing: Dia. 0.7 x 3.0T / Pitch 1mm |
![]() Small parts: Dia. 2.5 x 2.5L / Counterbore hole: Dia 1.6 x 2.0D |
![]() Rib: 0.5W x 2.0H |
![]() Pin: 0.8SQ x 0.5D |
Porous Ceramics - Manufacturable Dimensions (mm)
Minimum thickness | Maximum thickness | Dimension | Length | ||||||
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Thickness | Dimension | Thickness | Dimension | Thickness | Dimension | Thickness | Width | Length | |
AZP50 | 1 | ◻︎20 | 50 | ◻︎50 | 15 | ◻︎500 | 15 | 500 | 500 |
AZP60 | 1 | ◻︎20 | 50 | ◻︎50 | 15 | ◻︎500 | 15 | 500 | 500 |
AZP60B | 1 | ◻︎20 | 50 | ◻︎50 | 15 | ◻︎500 | 15 | 500 | 500 |
AZPW40 | 1 | ◻︎30 | 50 | ◻︎200 | 20 | ◻︎300 | 10 | 50 | 600 |
AZPWB40 |
1 | ◻︎30 | 50 | ◻︎200 | 20 | ◻︎300 | 10 | 50 | 600 |
AZPV60 | |||||||||
AZPS40 | 1 | ◻︎20 | 50 | ◻︎100 | 20 | ◻︎310 | 20 | 50 | 600 |
AZPVS60 |
*Contact us if you need even larger products than those in the above list.
*The dimensions above are only for reference. Depending on the shape, we may not be able to process material exactly as per those dimensions.
* The figures for AZPV60 and AZPVS60 will be entered after the demonstration test.
Property Chart - Porous Alumina and Porous SiC
Item | Unit | Alumina | SiC | ||||||
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AZP50 | AZP60 | AZP60B | AZPW40 | AZPWB40 | AZPV60 | AZPS40 | AZPVS60 | ||
Porosity | % | 50 | 60 | 73 | 40 | 35 | 60 | 40 | 60 |
Pore diameter | μm | 5〜40 | 5〜40 | 5〜40 | 50〜100 | 50~200 | 20~40 | 5~30 | 10~30 |
Bulk density | g/cm3 | 1.82 | 1.57 | 1.04 | 2.56 | 2.48 | 1.54 | 1.9 | 1.32 |
Air Penetration rate | (×10-13m2) | 0.8 | 5.73 | - | 100 | 270 | 200 | 6.1 | 160 |
Purity | % | 96 | 96 | - | 95 | 90 | 98 | ||
Flexual strength | MPa | 60 | 35 | 30 | 76 | 22 | 28 | 80 | 4 |
Dielectric constant | 1MHz | - | - | - | 4.1 | - | 3.8 | - | 35.8 |
Thermal conductivity | W/(m・K) | - | - | - | 3 | 5 | 13.4 | 70 | 70.4 |
Thermal expansion coefficient | ×10-6 | - | - | - | 7.6 | 7.6 | 8 | 4.4 | 4.4 |
(RT-800℃) | (RT-700℃) | ||||||||
Color | - | White | White | Black | White | Black | White | Glay | Black |
Application | Light-reducible | ○ | ○ | ○ | × | ○ | ○ | × | ○ |
Heat insulation | ○ | ○ | ○ | × | ○ | × | × | × | |
Vacuum Chuck | × | ○ | ○ | ○ | ○ | ○ | ○ | ○ | |
Filter, Rectification (Air/Fluid), Spraying |
× | ○ | ○ | ○ | ○ | ○ | ○ | ○ | |
Suited application | Light, Heat insulation | Fine surface, Able to grip films and thin wafers. | Suitable for image processing and anti-reflection. | Large pores with relatively good penetration rate. |
Suitable for image processing and anti-reflection. |
Smaller pores and higher penetgration rate than AZP60. |
Owning AZP60 properties plus more strength. Partial gripping possible. |
Suitable for setter plates that can prevent reaction between setters and works. |
Comparision between Normal Ceramics and Porous Ceramics
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Dielectric Constant【1MHz】
Indicates how much electricity can be stored.
Low dielectric loss material enhances uniformity of plasma. -
Thermal Conductivity
Indicates how easily heat can be transmitted.
Porous ceramics are low in thermal conductivity and adaptable with changes in temperature . -
Porosity Rate【%】
Indicates how many pores are present inside the ceramics. However, please do not take porosity rate as 'air permeability rate' because pores may present unevenly inside the ceramics.
For details about air permeability rate, please contact us. -
Flexural Strength【MPa】
Indicates strength against sudden load.
The strength is lower than normal dense ceramics, but worth choosing this as porous ceramics can provide other unparalleled benefits. -
Bulk Density【g/cm3】
Indicates the weight per volume.
Porous ceramics are lighter than normal alumina and SiC. -
Air Permeability Rate【×10-13m2】
Indicates air permeability of porous ceramics (JIS R 2115).
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Young's Modulus Elasticity【GPa】
Indicates the degree of the ceramics not being distorted by pressure.
The higher the value is, the more rigid it is, meaning that the material does not easily bend or distort even by pressure under load.
Porous Ceramics - Short Movies
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Porous SiC Vacuum Chuck
Air Gripping Test -
Porous Ceramics
Non-contact Levitation Stage -
Gripping Power Test by Large Porous Chuck
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Porous Ceramics Bubbler in High Temperature, Strong Acid, and Strong Alkaline Atmosphere
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Porous Ceramics Bubbler
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Porous Ceramics
Tweezers for Gripping Multi-directional Film
Contact Us
Customizable from single quantity orders.
Please feel free to contact us.
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ASUZAC Inc.
Fine Ceramics DivisionOpening hours:9:00~17:00(Sat, Sun closed)
FAX : +81-26-251-2160
Product Search
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Alumina
The most commonly used ceramic material
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Silicon Carbide (SiC)
Heat shock and wear resistance
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Porous Ceramics
Lightweight, suction, heat insulation
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Ceramics-
Mechanical Properties
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Thermal Properties
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Electric Properties
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Porous Ceramics-
Mechanical Properties
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Thermal Properties
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