Newly Developed Ceramics End Effector / Handling Arm|LeviZacTM - Bernoulli End Effector / Handling Arm that levitates wafer
Newly Developed Ceramics End Effector / Handling Arm
LeviZacTM
- Bernoulli End Effector / Handling Arm that levitates wafer
-
What is LeviZacTM?
As wafer patterns are becoming even finer and more complicated, the end effectors that do not damage and leave grip marks / particles are increasingly in higher demand. ASUZAC, as a leading manufacturer of ceramic End Effector / Handling Arm, has developed an unconventional End Effector / Handling Arm that responds to that market's needs. This is what we unveiled, LeviZacTM - Bernoulli's Principle-based ceramic End Effector / Handling Arm which can levitate and transport the wafer via airflow with minimal peripheral contact.
-
Features
Able to grip and transport a warped wafer securely.
Free from contact with the wafer except a periphery, so it won't leave grip marks and give uneven stress.
Minimized contact area within 3mm periphery made the surface less likely to cause particles.
-
Due to built-in air channel in a single piece body with no adhesives and metal cover, the structure becomes more durable and chemically stable under heated environments.
Price |
Leadtime | |
---|---|---|
Commonly available metal cover type |
1 | 1.5 months after receiving a firm order. |
LeviZacTM | 0.6* | *5 days after receiving a firm order. |
* Price & Leadtime: Possible only when no additional processing is required other than the width of the base, length and holes.
Contact Us
Customizable from single quantity orders.
Please feel free to contact us.
-
ASUZAC Inc.
Fine Ceramics DivisionOpening hours:9:00~17:00(Sat, Sun closed)
FAX : +81-26-251-2160